Out of Plane High Aspect Ratio Micro Wires as Suspension Elements in Inertial Sensors

Felix Greiner & Helmut F. Schlaak
Micro- and nanowires with high aspect ratios, arranged as slim and tall standing metal pillars offer promising features for microsystems [1–7]. The goals are: - 1st fabrication of high aspect ratio out of plane metal wires next to low aspect ratio blocks, - 2nd multilayer material link of these metal structures (one wire + two metal blocks), - 3rd realization and characterization of an acceleration sensor applying these structures. The KNMF services refer to the...
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