Non-Linear Frequency Noise Modulation in a Resonant MEMS Accelerometer

X Zou & Ashwin Seshia
Resonant MEMS accelerometers offer the potential for very high resolution and wide bandwidth measurements over a large input dynamic range. The read-out is implemented by constructing an oscillator with the resonator as the primary frequency determining element. The noise of this oscillator front-end typically determines the resolution of the device, and the noise floor is set by the modulation of operative noise processes by the system dynamics. The resonator element is typically operated in the...

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