Extending the Lifetime of Resonant Atmospheric Particulate Mass Sensors With Solvent Rinses

Arthur Zielinski, Nicole E Weckman, Roderic Jones, Markus Kalberer & Ashwin Seshia
The cleaning of a collection-based sensor extends its lifetime and reduces its effective cost. Existing cleaning regimes for silicon-based devices typically require access to large laboratory equipment. A simple cleaning method based on solvent rinses is presented here for the application of microresonator atmospheric particulate mass sensors. The suggested approach is intended for scenarios with limited access to laboratory equipment. Two piezoelectric resonator topologies (in-plane bulk mode and out-of-plane flexural) collected particles via impaction for...
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