Particulate mass sensing with piezoelectric bulk acoustic mode resonators

(:Unkn) Unknown
© 2016 IEEE.Current portable particle detection instruments typically rely on optical methods which are limited to 100 nm diameter particles. Microfabricated bulk acoustic resonators, when used as mass balances, could take particle detection below this limit. This study examines the collection of particles onto piezoelectric bulk acoustic mode resonators from gaseous flow using classical impaction. Collection of both polystyrene latex particles and α-pinene secondary organic aerosol particles was examined in terms of frequency shift and...

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