Improved heterojunction quality in Cu2O-based solar cells through the optimization of atmospheric pressure spatial atomic layer deposited Zn1-xMgxO

Yulia Ievskaya, Robert Hoye, Aditya Sadhanala, Kevin P Musselman & Judith L MacManus-Driscoll
Atmospheric pressure spatial atomic layer deposition (AP-SALD) was used to deposit n-type ZnO and Zn1-xMgxO thin films onto p-type thermally oxidized Cu2O substrates outside vacuum at low temperature. The performance of photovoltaic devices featuring atmospherically fabricated ZnO/Cu2O heterojunction was dependent on the conditions of AP-SALD film deposition, namely, the substrate temperature and deposition time, as well as on the Cu2O substrate exposure to oxidizing agents prior to and during the ZnO deposition. Superficial Cu2O to...

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