Mode-localized sensing in micro- and nano-mechanical resonator arrays

Ashwin Seshia
Micromachined resonant sensors have been researched for several decades for a variety of applications with potential benefits in terms of improved sensitivity and scalability relative to other transduction principles. Conventional implementations usually involve detection elements monitoring resonant frequency and/or dissipation shift in a single degree-of-freedom or several independent degrees-of-freedom. This paper discusses a complementary approach to resonant sensing in which the eigenstates in coupled array structures can be employed as a read-out mechanism offering the...
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