3.2.4 Programmable reference parameters for resonance locking in electro-thermal piezoresistive cantilever sensor

A. Setiono, M. Fahrbach, J. Xu, W. O. Nyang’au, M. Bertke, H. S. Wasisto & E. Peiner
Resonant-frequency tracking is essential when measuring analyte targets using resonance-based sensors in real-time. We developed a self sensing and actuating silicon cantilever resonator that can be functionalized as an environmental sensor for analytes such as particles, humidity, and gases. However, direct thermal parasitic causes the sensor to generate a non-ideal output signal which hinders implementing a real-time phase-locked loop (PLL) based setup. To alleviate these problems, software de-embedding solutions to create an optimized signal, especially...
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